Concepedia

Deposition of silicon carbon nitride thin films by microwave ECR plasma enhanced unbalance magnetron sputtering

Peng Gao, Jun Xu, Yong Piao, Wanyu Ding, Dehe Wang, Xinlu Deng, Chuang Dong

Surface and Coatings Technology · 2006 · 45 citations · 20 references

DOI

Concepts

References

20

Handbook of X-Ray Photoelectron Spectroscopy

J. F. Moulder · Medical Entomology and Zoology · 1995 · 23.7K citations

, , +10

Prediction of New Low Compressibility Solids

Amy Liu, Marvin L. Cohen · Science · 1989 · 2.7K citations

, , +15

Experimental Realization of the Covalent Solid Carbon Nitride

Chunming Niu, Yuan Z. Lu, Charles M. Lieber · Science · 1993 · 895 citations

, , +10

Carbon Nitride Deposited Using Energetic Species: A Two-Phase System

D. Marton, Kevin J. Boyd, A. Al-Bayati et al. · Physical Review Letters · 1994 · 769 citations

, , +13

Crystalline silicon carbon nitride: A wide band gap semiconductor

Li–Chyong Chen, C. K. Chen, Shih‐Chun Wei et al. · Applied Physics Letters · 1998 · 165 citations

, , +17