Concepedia

Publication | Closed Access

Deposition of silicon carbon nitride thin films by microwave ECR plasma enhanced unbalance magnetron sputtering

DOI

43

Citations

20

References

2006

Year

Peng Gao, Jun Xu, Yong Piao, Wanyu Ding, Dehe Wang, Xinlu Deng, Chuang Dong
Surface and Coatings Technology

References

YearCitations

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