Mechanical properties of hydrogen-free a-C:Si films - Concepedia

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Mechanical properties of hydrogen-free a-C:Si films

29

Citations

19

References

2003

Year

V. Kulikovsky, V. Vorlı́ček, P. Boháč, A. V. Kurdyumov, L. Jastrabı́k

Diamond and Related Materials

Materials ScienceSi FilmsEngineeringSurface ScienceApplied PhysicsThin FilmsSilicon On InsulatorThin Film Processing

References

	Year	Citations

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