Low temperature SiO2 films - Concepedia

Concepedia

Publication | Closed Access

Low temperature SiO2 films

15

Citations

10

References

1991

Year

C. Falcony, A. Ortíz, S. López, J. C. Alonso, S. Mühl

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsSilicon On InsulatorThin Film Processing

References

	Year	Citations

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