Properties of Microstrip and Coplanar Lines on Semiconductor Substrates

Abstract

In M.I.C. technology it is important to know well the propagation properties of planar lines laid on semiconductor substrates. For this purpose we have developped two complementary theoretical analysis. The first one based on the Finite Element Method (F.E.M.), the second one on Spectral Domain Approach (S.D.A.). We present some attemps of these analysis which are compared to experimental results.