Publication | Closed Access
Effects of thermal treatment on infrared optical properties of SiO 2 films on Si Substrates
29
Citations
12
References
2013
Year
Materials ScienceSio 2Thermal TreatmentOptical MaterialsEngineeringOptical PropertiesApplied PhysicsSemiconductor Device FabricationThin FilmsSilicon On InsulatorChemical Vapor DepositionThin Film ProcessingInfrared Optical Properties
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