Vacuum · 2011 · 88 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating TechnologyCoatingsDefect ModelingDefects In Electronic MaterialsSemiconductor DefectsSurface CoatingsCoating DefectsDeposition DefectsThin-film Coatings
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