Publication | Closed Access
An analysis of macroparticle-related defects on CrCN and CrN coatings in dependence of the substrate bias voltage
86
Citations
19
References
2011
Year
Materials EngineeringCrn CoatingsMaterials ScienceMacroparticle-related DefectsEngineeringSurface ScienceApplied PhysicsSubstrate Bias Voltage
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