Publication | Closed Access
Minority charge carrier lifetime mapping of crystalline silicon wafers by time-resolved photoluminescence imaging
62
Citations
13
References
2011
Year
Optical MaterialsEngineeringTime-resolved Photoluminescence ImagingIntegrated CircuitsSilicon On InsulatorImage SensorSemiconductor DeviceElectronic DevicesSemiconductor InterfacesInstrumentationDecay CurveElectrical EngineeringPhotoluminescenceCamera SignalSemiconductor Device FabricationCrystalline Silicon WafersOptical SensorsSilicon DebuggingApplied PhysicsOptoelectronics
A camera-based method to record spatially and time-resolved photoluminescence images of crystalline silicon wafers was developed. The camera signal is modulated by a rotating shutter wheel, allowing for a wide range of camera types to be used for the measurement and easy integration into existing photoluminescence setups. The temporal resolution is sufficient to record the decay curve of photoexcited charge carriers in surface-passivated silicon wafers. A transient measurement of minority carrier lifetimes down to less than 10 μs can be obtained for each pixel individually, without the need for any external calibration.
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