Structural evolution of a-C:F:H film prepared by microwave ECR CVD - Concepedia

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Structural evolution of a-C:F:H film prepared by microwave ECR CVD

11

Citations

23

References

2002

Year

Yunzi Xin, Zhehong Gan, Liang Fang, Z.Y. Ning, Fan Zheng, Shanhua Cheng

Surface and Coatings Technology

Materials ScienceEngineeringPhysicsSurface ScienceApplied PhysicsMicrowave Ecr CvdMicrowave Engineering

References

	Year	Citations

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