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A comparative study of Ar and H2 as carrier gases for the growth of SiC films on Si(100) by electron cyclotron resonance chemical vapor deposition at low temperature

Materials ScienceMaterials EngineeringCarrier GasesEngineeringNanoelectronicsApplied PhysicsSic FilmsChemical DepositionSilicon On InsulatorMicroelectronicsComparative StudyChemical Vapor DepositionCarbide