Highly Uniform 28Gb/s Si Photonics Platform for High-Density, Low-Power WDM Optical Interconnects

Abstract

We report on electro-optical device performance in a fully integrated 28Gb/s Si photonics platform running on a 130-nm CMOS toolset. Extensive uniformity data is presented for ring modulators, Ge photodetectors and compact ring-based WDM filters.