Preparation of Y-Ba-Cu-O Superconducting Thin Film by Chemical Vapor Deposition

Abstract

Y-Ba-Cu-O film was prepared by chemical vapor deposition using tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III) (Y(DPM) 3 ), bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)barium(II) (Ba(HFA) 2 ) and bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)copper(II) (Cu(HFA) 2 ). Superconducting transition was observed with T c (onset)=83 K and T c ( R =0)=65 K for these CVD films after an annealing process. Typical films of Y-Ba-Cu-O on a (001) SrTiO 3 substrate exhibited the presence of YBa 2 Cu 3 O y according to X-ray diffraction patterns.