Sensors and Actuators A Physical · 1993 · 19 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceInstrumentationMicroelectromechanical SystemsThin FilmsPressure MeasurementPressure SensorsThin Film Mechanical PropertiesThin Film StrainThin-film MaterialsTransducer TechnologyPressure Transducer TechnologyPressure TransducersThin-film Piezoelectric Transducers
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821. Thin film strain-gauge transducers
Vacuum · 1966 · 16 citations