Publication | Closed Access

Growth of bismuth oxide films by direct liquid injection-metal organic chemical vapor deposition with Bi(tmhd)3 (tmhd: 2,2,6,6-tetramethyl-3,5-heptanedione)

Materials ScienceChemical EngineeringEngineeringNanotechnologyOxide ElectronicsSurface ScienceChemistryThin FilmsChemical DepositionFunctional MaterialsChemical Vapor DepositionThin Film Processing