Publication | Closed Access
Coplanar amorphous silicon thin film transistor fabricated by inductively-coupled plasma CVD
15
Citations
3
References
1999
Year
Electrical EngineeringPlasma ElectronicsEngineeringNanoelectronicsInductively-coupled Plasma CvdApplied PhysicsSemiconductor Device FabricationPlasma ProcessingThin Film Processing
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