One-step formation of aligned carbon nanotube field emitters at 400 °C

Abstract

Fabrication of field emitters by the radio-frequency plasma-enhanced chemical vapor deposition of vertically aligned carbon nanotubes (CNT) on soda-lime glass is reported. CNT was produced at 400 °C by the control of the collision energy of carbonic cations to a substrate through a dc bias voltage. The CNTs produced in this work were of a cup-stacked type and had catalyst particles on the top. The CNT emitters formed by our method were integrated into triode-type microcathodes and showed field-emission properties suitable for display applications.