Large volume, high density rf inductively coupled plasma

Abstract

Magnetized argon plasma columns with peak densities of greater than 1018 m−3, lengths of 2 m, and full width half-maximum diameters of 0.3 m have been created at pressures of 40 mPa (3×10−4 Torr) with input powers of 1.5 kW of 7 MHz rf.