Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2005 · 12 citations · 0 references
Biomedical AcousticsEngineeringPs ArrayPhased Array OperationSonoelectrochemistryPower UltrasoundDirectional Sound EmitterUltrasound EmissionMaterials ScienceElectrical EngineeringNanotechnologyAcoustic PropagationUltrasoundMicroelectronicsNanomaterialsApplied PhysicsAcoustic TweezerAcoustic MicroscopyMicromachined Ultrasonic Transducer
To confirm the applicability of thermally induced ultrasound emission from nanocrystalline porous silicon (nc-PS) devices as directional sound emitter, the radiation pattern of one-dimensionally arrayed nc-PS device have been investigated. The nc-PS emitter is fabricated on a p-type Si substrate by conventional electrochemical anodization with subsequent formation of the surface electrode. It is shown that the emission pattern of arrayed devices can be controlled due to flat nature of the frequency response of the individual nc-PS devices. Furthermore we report a technique for wave control by phase-shift operation. This PS array enables the development of a directional sound emitter and intense sound source. (© 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)