Publication | Open Access
Stability of large vacancy clusters in silicon
66
Citations
33
References
2002
Year
Stable StructuresEngineeringComputational ChemistryChemistrySilicon On InsulatorElectronic StructureLarge Vacancy ClustersRelaxed StructuresCluster SciencePhysicsChemical BondPhysical ChemistryDefect FormationSemiconductor Device FabricationVarious Vacancy ClustersQuantum ChemistryNatural SciencesApplied PhysicsCondensed Matter Physics
Using a density-functional-based tight-binding method we investigate the stability of various vacancy clusters up to a size of 17 vacancies. Additionally, we compute the positron lifetimes for the most stable structures to compare them to experimental data. A simple bond-counting model is extended to take into account the formation of new bonds. This yields a very good agreement with the explicitly calculated formation energies of the relaxed structures for ${V}_{6}$ to ${V}_{14}.$ The structures, where the vacancies form closed rings, such as ${V}_{6}$ and ${V}_{10},$ are especially stable against dissociation. For these structures, the calculated dissociation energies are in agreement with experimentally determined annealing temperatures and the calculated positron lifetimes are consistent with measurements.
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