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Structure of diamond-like carbon films containing transition metals deposited by reactive magnetron sputtering

Materials ScienceMaterials EngineeringDiamond-like Carbon FilmsDiamond-like CarbonEngineeringGlassy CarbonPhysicsNanomaterialsNanoelectronicsTransition MetalsCarbon-based MaterialApplied PhysicsCarbon-based FilmsReactive Magnetron Sputtering