Publication | Closed Access
Deposition of amorphous hydrogenated carbon films on steel surfaces through the enhanced asymmetrical modified bipolar pulsed-DC PECVD method
27
Citations
50
References
2014
Year
Materials EngineeringMaterials ScienceChemical EngineeringCarbon FilmsEngineeringSurface SciencePulsed Laser DepositionChemical DepositionSteel SurfacesChemical Vapor DepositionThin Film Processing
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