X‐Ray Measurement of Residual Stresses in Textured Thin Coatings

L. De Buyser, P. Van Houtte, Etienne Aernoudt

Texture Stress and Microstructure · 1991 · 10 citations · 0 references

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Abstract

The X‐ray diffraction technique is a well known non‐destructive method to determine the residual stress level in a material. The most commonly used method is the ′d‐sin 2 Ψ′ method. However for textured materials and very thin coatings (0.1 .. 2 μm), this method can no longer be applied as will be shown. Therefore, a new measurement method, based on the ’glance angle’ technique has been developed.