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Effects of the deposition conditions and annealing process on the electric properties of hot-filament CVD diamond films

Materials EngineeringMaterials ScienceElectrical EngineeringDiamond-like CarbonEngineeringElectric PropertiesNanoelectronicsApplied PhysicsDeposition ConditionsThin FilmsChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film ProcessingElectrical Insulation