Sensors · 2006 · 136 citations · 21 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSensorsThin FilmsAluminum OxidesChemical SensorsGas SensorsMetal Oxide NanomaterialsOxide SemiconductorsThin-film DepositionElectrical PropertiesElectrical Properties AnalysisGas SensingInterdigitated Electrode SensorsMetal Oxide Gas SensorsSemiconductor Gas SensorsSemiconductor Oxide Thin FilmsThin-film Sensor Materials
The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrateusing Pt as interdigitated electrodes. The structure was characterized by XRD and SEManalyses, and the ethanol vapor gas sensing as well as electrical properties have beeninvestigated and discussed. The gas sensing results show that the sensitivity for detecting400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity,fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetronsputtering can be used for ethanol vapor gas sensing.
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