40 000 pixel arrays of ac-excited silicon microcavity plasma devices

Abstract

Arrays of (50μm)2 Si microcavity plasma devices, as large as 40000pixels (200×200) with a packing density of 104pixelscm−2, have been operated continuously in 500–900Torr of Ne with ac excitation (5–20kHz). More than two orders of magnitude larger than previously reported microplasma device arrays, 200×200pixel structures produce uniform glow discharges in each pixel, have a power consumption of ∼0.85Wcm−2 for pNe=700Torr and an excitation frequency of 5kHz, and exhibit maximum radiative efficiency for a Ne pressure of pNe≅700Torr and an excitation frequency of 10–15kHz. All arrays examined (10×10→200×200) are characterized by pixel-to-pixel emission intensities constant over the entire array to within ±10%, and no barriers to the successful operation of much larger arrays are apparent.