Dynamic parameter estimation of atomic layer deposition kinetics applied to in situ quartz crystal microbalance diagnostics - Concepedia

Concepedia

Publication | Open Access

Dynamic parameter estimation of atomic layer deposition kinetics applied to in situ quartz crystal microbalance diagnostics

DOI Full Paper Access

15

Citations

84

References

2014

Year

Anders Holmqvist, Tobias Törndahl, Fredrik Magnusson, U. Zimmermann, Stig Stenström

Chemical Engineering Science

Materials ScienceEngineeringDynamic Parameter EstimationCrystal Growth TechnologySurface ScienceApplied PhysicsInstrumentationChemical DepositionCrystal FormationCrystallographyMicrostructure

References

	Year	Citations

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