Optimisation of discharge parameters for the analysis of high purity silicon wafers by magnetic sector glow discharge mass spectrometry - Concepedia

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Optimisation of discharge parameters for the analysis of high purity silicon wafers by magnetic sector glow discharge mass spectrometry

16

Citations

9

References

1992

Year

Dafydd Milton, Robert C. Hutton, Gerry A. Ronan

Analytical and Bioanalytical Chemistry

Electrical EngineeringEngineeringGlow DischargeMass SpectrometryApplied PhysicsDischarge ParametersAnalytical ChemistrySemiconductor Device FabricationInstrumentationGas Discharge PlasmaSilicon Debugging

References

	Year	Citations

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