Integrated model for the radio frequency induction plasma torch and power supply system

Abstract

An integrated mathematical model is proposed for the simulation of the radio frequency (r.f.) induction plasma torch and power supply system in which the induction plasma is considered as part of the r.f. network. The model is based on a turbulent flow representation of the discharge which allowed the computation of the flow, temperature and concentration fields in the plasma under a wide range of conditions. The approach provides means of estimating steady state output electrical parameters of the generator such as grid voltage, d.c. plate current, r.f. plate voltage and current as function of the plate voltage. The model also allows for the computation of the plasma impedance and the overall efficiency of power transmission to the plasma in addition to standard plasma flow, temperature, composition and electromagnetic fields. The proposed approach provides a valuable tool for integrated induction plasma system design and parameter optimization.