Publication | Closed Access
Hydrogen in crystalline silicon: A deep donor?
119
Citations
26
References
1987
Year
Crystalline SiliconEngineeringPhysicsHydrogen TransitionIonized Hydrogen DiffusionHydrogen Concentration ProfilesNatural SciencesApplied PhysicsIntrinsic ImpurityAtomic PhysicsHydrogen UtilizationFermi LevelHydrogenChemistrySilicon On Insulator
An analysis of the hydrogen concentration profiles obtained from secondary ion mass spectrometry in boron-doped silicon points to a deep donor hydrogen state located ∼0.1 eV above the Fermi level for intrinsic material. The theoretical model takes into account both neutral and ionized hydrogen diffusion, the latter enhanced by a built-in electric field associated with the hydrogen doping gradient. The activation energies for the two diffusion processes are ∼1.2 and ∼0.8 eV, respectively. A formerly reported discrepancy between low- and high-temperature results is lifted.
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