A hydrogen sensor based on Mg–Pd alloy thin film

Abstract

We report on the hydrogen sensing property of Pd-capped Mg–Pd alloy thin films which were prepared by dc magnetron sputtering. Pd-capped Mg0.9Pd0.1 films of thicknesses 10 nm Pd and 40 nm Mg–Pd show a good hydrogen sensing property for hydrogen-containing atmosphere at room temperature. Their sensing range is from 40 ppm to 4% hydrogen in Ar. These films are supposed to be candidates for a low-cost room temperature hydrogen sensor.