Relationships between the crystalline phase of an IGZO target and electrical properties of a-IGZO channel film - Concepedia

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Relationships between the crystalline phase of an IGZO target and electrical properties of a-IGZO channel film

33

Citations

10

References

2011

Year

Yih-Shing Lee, Zuo-Ming Dai, Cheng-I Lin, Horng‐Chih Lin

Ceramics International

Materials ScienceElectrical EngineeringEngineeringCrystalline PhaseApplied PhysicsIgzo TargetThin FilmsA-igzo Channel FilmMicroelectronicsCrystallography

References

	Year	Citations

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