A study of the density of sputtered atoms in the plasma of the modified Grimm-type glow discharge source - Concepedia

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A study of the density of sputtered atoms in the plasma of the modified Grimm-type glow discharge source

51

Citations

12

References

1981

Year

N.P. Ferreira, H.G.C. Human

Spectrochimica Acta Part B Atomic Spectroscopy

EngineeringPhysicsGlow DischargeApplied PhysicsSputtered AtomsAtomic PhysicsGas Discharge PlasmaPlasma Application

References

	Year	Citations

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