SID Symposium Digest of Technical Papers · 2002 · 17 citations · 1 references
EngineeringManufacturing EngineeringMaterials EngineeringElectronic MaterialsOptoelectronicsSemiconductor DevicesDisplay TechnologiesLight-emitting DiodesOrganic SemiconductorsThin Film EtchingEtch MechanismsEtch RateManufacturingOrganic ElectronicsOrganic Light-emitting Diode DisplaysOrganic Light-emitting DiodesOrganic Light-emitting Materials
Abstract A profitable mass production of Organic Light Emitting Diode (OLED) displays needs a new type of manufacturing equipment. We present the concept of a vertical In‐Line machine equipped with linear etch and linear evaporation sources for organic materials(small molecules) and sputter as well as evaporation sources for metals and ITO.
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