Vibration energy harvesting using highly (001)-oriented Pb(Zr,Ti)O3 thin film

Abstract

Energy conversion from mechanical vibration into electric power was investigated using the piezoelectric Pb(Zr,Ti)O3 lead zirconate titanate (PZT) thin film with highly (001)-orientation. The piezoelectric d31 constant was found to be as large as −150 pC/N. The generated electric voltage under vibration acceleration of 45 m/s2 at 2450 Hz for the PZT/Si cantilever exceeded 2 V and the operation of light emitting diode lighting was demonstrated. The average output power of 100 μW was obtained at the impedance-matched load resistance of 2.2 kΩ. The generated power density of 50 μW/mm3 was much larger than that of conventional piezoelectric harvesters.