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Determination of the local environment of silicon and the microstructure of quaternary CrAl(Si)N films

Materials ScienceMaterials EngineeringLocal EnvironmentEngineeringPhysicsSurface ScienceApplied PhysicsN FilmsSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsQuaternary CralMicrostructureThin Film Processing