Advanced Modes of Imaging of Ferroelectric Domains in SEM

Abstract

Scanning electron microscope (SEM) ability to control focused electron beam allows studying materials, which are highly responsive to external exposure. Active modes of SEM investigation based on specific responses are suggested. A modification of electron beam induced current mode for domain imaging in TGS-crystals is suggested. A focused electron beam can be used as a local heat source for SEM images due to pyroelectric effect. The peculiarities of a SEM domain structure image caused by electrical and thermal factors are considered.