Magnetic deflexion of electron beams without astigmatism

Abstract

An electron beam passing through a magnetic deflecting field is, in general, subject to astigmatism. For circular pole-pieces, this takes the form of focusing in the plane of deflexion; for square pole-pieces, focusing perpendicular to the plane of deflexion. Deflexion free from astigmatism can be achieved by means of circular pole-pieces from which semicircular portions have been removed. An application of this to reflexion electron microscopy is described.