MRS Proceedings · 1998 · 15 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceSensorsSurface ScienceThin FilmsCoating TechnologyCoatingsFerroelectric MaterialsPiezoelectric MaterialsThin-film DepositionThin-film MaterialsPiezoelectric PropertiesPiezoelectric Thin FilmsThin Film FerroelectricsThin-film Piezoelectric ActuatorsThin-film Piezoelectrics
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