The evaluation of the use of a scanning electron microscope combined with an energy dispersive X‐ray analyser for quantitative analysis

Abstract

Abstract This paper describes an evaluation of the use of a scanning electron microscope to perform a rapid total analysis under secondary electron image conditions using a commercial energy dispersive X‐ray analyser. Problems encountered with overlapping intensity peaks and interference by the solid state Si (Li) detector are discussed. Elements heavier than sodium are detectable in metallic and geological samples and the total analysis of oxides requires only pure elements as standards.