Secondary ion mass spectrometric studies of SrTiO3 buffering effect on (Pb1−<i>x</i>La<i>x</i>)(Zr1−<i>y</i>Ti<i>y</i>)1−<i>x</i>/4O3 thin films prepared by pulsed laser deposition

Abstract

Thin films of (Pb1−xLax)(Zr1−yTiy)1−x/4O3 (5/70/30) were deposited in situ onto (100) Si, Pt/Ti/SiO2/Si, and SrTiO3/Si substrates by pulsed laser deposition from stoichiometric targets and subsequent annealing. Films grown on SrTiO3/Si exhibited desired perovskite structure. On (100) Si and Pt/Ti/SiO2/Si substrates, films exhibited a perovskite-pyrochlore mixed structure. Apparent Pb deficiency at the near-surface region was observed. Films deposited at different substrates showed variations in Si content. The buffering effect of SrTiO3 was evidenced using x-ray diffraction and secondary ion mass spectrometry analyses.