A high-resistivity SiGe BiCMOS technology for WiFi RF front-end-IC solutions

Abstract

We present for the first time a novel high resistivity bulk SiGe BiCMOS technology that has been optimized for a WiFi RF front-end-IC (FEIC) integration. A nominally 1000 Ohm-cm p-type silicon substrate is utilized to integrate several SiGe HBTs for power amplifiers (PAs), a SiGe HBT low-noise amplifier (LNA), and isolated nFET RF switch device. Process elements include trench isolation for low-loss passives and reduced parasitic coupling, and a lower-resistivity region for the FETs to minimize changes to the circuit library.