Concepedia

Interrelationship between processing, coatingproperties and functional properties of steered arc physically vapour deposited (Ti,AI)N and (Ti,Nb)N coatings

J.R. Roos, Jean‐Pierre Célis, E. Vancoille, H. Veltrop, S. Boelens, F. Jungblut, J. Ebberink, Hellmut Homberg

Thin Solid Films · 1990 · 127 citations · 21 references

DOI

Concepts

References

21

A method for interpreting the data from depth-sensing indentation instruments

M. Doerner, William D. Nix · Journal of materials research/Pratt's guide to venture capital sources · 1986 · 2.8K citations

, , +5

Titanium aluminum nitride films: A new alternative to TiN coatings

Wolf‐Dieter Münz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 947 citations

, , +17

Hardness measurement at penetration depths as small as 20 nm

J. B. Pethicai, R. Hutchings, W. C. Oliver · Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1983 · 924 citations

, , +17

Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum

O. Knotek, W.‐D. Münz, T. Leyendecker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 307 citations

, , +17

Young's modulus of TiN, TiC, ZrN and HfN

E. J. Torok, A.J. Perry, L. Chollet et al. · Thin Solid Films · 1987 · 275 citations

, , +6