Concepedia

Publication | Closed Access

Carbon nitride thin films formed by low energy ion beam deposition with positive and negative ions

DOI

20

Citations

100

References

1997

Year

B. Enders, Y. Horino, Nobuteru Tsubouchi, Akiyoshi Chayahara, A. Kinomura, Katsushi Fujii
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1