Physical Review Letters · 2001 · 53 citations · 18 references
Natural SciencesMaterials SciencePhysicsElectronic MaterialsMaterials PhysicsSpectroscopyDefects In Electronic MaterialsDevice CharacterizationDevice ReliabilityMaterial DegradationSemiconductor DefectsSilicon MaterialsDefect PhysicsDevice DegradationHigh-resolution Infrared SpectroscopyInfrared Absorption SpectroscopyMolecular Vibrational ModesSilicon DefectsSilicon PhysicsVibrational Modes
Lifetimes of hydrogen and deuterium related stretch modes in Si are measured by high-resolution infrared absorption spectroscopy and transient bleaching spectroscopy. The lifetimes are found to be extremely dependent on the defect structure, ranging from 2 to 295 ps. Against conventional wisdom, we find that lifetimes of Si-D modes typically are longer than for the corresponding Si-H modes. The potential implications of the results on the physics of electronic device degradation are discussed.
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Atomic-Scale Desorption Through Electronic and Vibrational Excitation Mechanisms
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Lifetime of an adsorbate-substrate vibration: H on Si(111)
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Cryogenic UHV-STM Study of Hydrogen and Deuterium Desorption from Si(100)
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