Publication | Closed Access
RANGES OF HEAVY IONS IN AMORPHOUS OXIDES
71
Citations
6
References
1964
Year
Materials EngineeringMaterials ScienceRange DistributionsIon ImplantationEngineeringAr 41Aluminium NitrideO 3Oxide ElectronicsSolid-state IonicSurface ScienceApplied PhysicsAtomic PhysicsChemistryAmorphous SolidIon EmissionCrystallography
The range distributions of Na 24 , Ar 41 , Kr 85 , and Xe 125 ions in amorphous Al 2 O 3 and WO 3 have been measured in the energy interval 0.5 to 160 keV. The experimental technique consisted of measuring the transmission through oxide layers formed anodically on metal foils. The penetrating tail of distributions measured in crystalline targets is found to be absent in amorphous targets. Comparison with the calculations of Lindhard et al. (1963), who assume a random distribution of the target atoms, shows good agreement between theory and experiment.
| Year | Citations | |
|---|---|---|
Page 1
Page 1