Concepedia

Publication | Closed Access

Statistical approach for optimizing sputtering conditions of highly oriented aluminum nitride thin films

DOI

55

Citations

9

References

1998

Year

Morito Akiyama, Chao‐Nan Xu, Kazuhiro Nonaka, Kazuhisa Shobu, Tadahiko Watanabe
Thin Solid Films

References

YearCitations

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