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Silicon field-effect transistor based on quantum tunneling
151
Citations
7
References
1994
Year
Device ModelingElectrical EngineeringEngineeringTunneling MicroscopyPhysicsStress-induced Leakage CurrentQuantum DeviceApplied PhysicsCurrent FlowSchottky BarrierQuantum TunnelingIntegrated CircuitsSi ChannelMicroelectronicsBeyond CmosSemiconductor Device
This letter explores regulation of current flow within a silicon field-effect transistor by gate-induced tunneling through a Schottky barrier located at the interface between a metallic source electrode and the Si channel. The goal here is to forestall short-channel effects which are expected to prevent further size reductions in conventional devices when linewidths reach ∼1000 Å. Control of tunneling appears to be possible at minimum channel lengths L∼250 Å or less while simultaneously eliminating the need for large-area source and drain contacts, so that scaling of Si transistors could be significantly extended if this principle proves technically feasible.
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