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Ultrahigh vacuum <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> transmission electron microscopy observations of molecular-beam epitaxially grown InSb(111)
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1988
Year
Materials ScienceHomoepitaxial Growth ProcessesIi-vi SemiconductorEngineeringPhysicsCrystalline DefectsUltrahigh VacuumCrystal Growth TechnologySurface ScienceApplied PhysicsCondensed Matter PhysicsSuperconductivityInsb FilmsVacuum DeviceThin FilmsMolecular Beam EpitaxyEpitaxial GrowthChemical Vapor Deposition
Ultrahigh vacuum in situ transmission electron microscopy has been used to investigate homoepitaxial growth processes and a 2×2 surface reconstruction of InSb(111) by molecular-beam epitaxy. When the incident fluxes (1:1) of Sb4 and In1 are impinged onto the substrate, the respective molecules form homoepitaxially grown InSb films, leaving an excess molecule Sb* which does not contribute to the formation of the InSb films. As a result, there exists a critical temperature (Th) for the condensation of Sb* molecules. Below Th, the surface concentration of Sb* (nSb*) becomes higher than a critical concentration for the condensation (ncSb*), so that two phases (InSb+Sb) grow in a polycrystalline state. However, above Th as nSb* becomes lower than ncSb*, InSb films grow with the 2×2 reconstructed surfaces. This critical temperature is defined as a homoepitaxial temperature. Quantitative interpretations of Th are discussed.
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