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The relationships between sputter deposition conditions, grain size, and phase transformation temperatures in NiTi thin films

Materials ScienceMaterials EngineeringAluminium NitridePhase Transformation TemperaturesEngineeringPhysicsSurface ScienceApplied PhysicsNiti Thin FilmsThin FilmsChemical DepositionGrain SizeChemical Vapor DepositionThin Film ProcessingMicrostructure