<i>In-situ</i> x-ray diffraction study of the growth of highly strained epitaxial BaTiO3 thin films

Abstract

In-situ synchrotron x-ray diffraction was performed during the growth of BaTiO3 thin films on SrTiO3 substrates using both off-axis RF magnetron sputtering and pulsed laser deposition techniques. It was found that the films were ferroelectric during the growth process, and the presence or absence of a bottom SrRuO3 electrode played an important role in the growth of the films. Pulsed laser deposited films on SrRuO3 displayed an anomalously high tetragonality and unit volume, which may be connected to the previously predicted negative pressure phase of BaTiO3.