Publication | Closed Access

Microstructural evolution and piezoelectric properties of thick Pb(Zr,Ti)O₃ films deposited by the multi-sputtering method: Part II. Piezoelectric properties

Materials ScienceEngineeringApplied PhysicsPiezoelectric MaterialsPiezoelectric PropertiesPiezoelectric MaterialThick PbThin FilmsPiezoelectricityThin Film Process TechnologyThin Film ProcessingMicrostructurePart Ii